Abstract

The paper presents modelling precise dual axis flexure-based precision positioning systems for micro-positioning applications. The positioning system is featured with monolithic architecture, flexure-based joints and piezo stacks. Its workspace has been evaluated via analytical approaches. Amplification mechanism is optimally designed. The mathematical model of the positioning system has been derived and verified by resorting to finite element analysis (FEA). The established analytical and (FEA) models are helpful for optimizing reliable architecture and improving the performance of the positioning system. Santrauka Straipsnyje pristatomas dviejų ašių didelio tikslumo pozicionavimo sistemos su paketiniais pjezovykdikliais modeliavimas, taikant besideformuojančius vientiso kūno mechanizmus. Pozicionavimo sistemą sudaro besideformuojančio vientiso kūno mechanizmas ir paketiniai pjezovykdikliai. Besideformuojantis vientiso kūno mechanizmas norimam poslinkiui pasiekti buvo optimizuotas Solidworks Simulation programiniu paketu. Platformų poslinkiams apskaičiuoti sudarytas matematinis modelis, kurio patikimumas patikrintas baigtinių elementų metodu. Sudaryto matematinio modelio ir rezultatų, gautų baigtinių elementų metodu, skirtumai yra mažesni nei 5 %, todėl pasiūlyta modeliavimo metodika gali būti taikoma kuriant pozicionavimo sistemas su besideformuojančiais elementais.

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