Modeling the mechanical response of microelectromechanical system (MEMS)-based sensors to volatile alcohol vapors: A finite element analysis

Abstract

The development of microelectromechanical system-based sensors, such as microcantilever sensors, has garnered considerable interest across various fields. Notably, there is a significant focus on the detection of volatile alcohol vapors, which holds promise in mitigating breath-related illnesses. This study employed finite element analysis to simulate the deflection of a silica-based microcantilever coated with polymethyl methacrylate in response to different volatile alcohol vapors (VAVs), such as methanol, ethanol, and isopropanol. A Multiphysics framework was used to analyze the time-dependent response of a microcantilever to different concentrations of VAVs incorporating fluid–structure interaction. This complex model integrated the aspects of laminar flow, solid mechanics, and transport of dilute species. Significant agreement has been achieved between finite element analysis-simulated results and the experimental findings that we had previously documented. This alignment revealed consistent trends, with methanol exhibiting higher levels than ethanol, followed by isopropanol, further validating the robustness and reliability of the sensor system in VAV detection.