Abstract
In this paper, a new micromechanical disc resonator with two L-shaped horizontal support beams in torsional mode vibrations has been proposed. The proposed micromechanical resonator has been studied in the field of natural frequencies and support loss. In order to verify the findings of natural frequencies, the analytical results are compared to the simulation results given by ANSYS software. A good agreement between analytical and simulation results is shown. In addition a closed-form equation for support loss quality factor in torsional mode vibrations of the proposed micromechanical resonator is presented. The results show that using L-shaped support beams can improve the support loss quality factor up to two times.
Highlights
Micromechanical resonators are small micromechanical devices which vibrate at high frequencies and are used in devices such as filters [1], sensors [2] and gyroscopes [3]
In [12], authors presented the analytical equation of the support loss quality factor in the plunging-mode vibrations of a micromechanical rectangular-plate resonator with two Tshaped support beams
The closed-form expressions were obtained for natural frequency and support loss quality factor in the torsional mode vibrations of micromechanical disk resonator with two support beams
Summary
Micromechanical resonators are small micromechanical devices which vibrate at high frequencies and are used in devices such as filters [1], sensors [2] and gyroscopes [3]. Several loss mechanisms in the resonators exist, such as air damping, thermoelastic damping (TED) and support loss. The measured unloaded quality factor is mainly the combination of these loss mechanisms, which expressed as [4]:
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