Abstract
In this paper, we performed a one-dimensional fluid model to study the mechanism and optimization of pulse-modulated Radio-Frequency (RF) discharges at atmospheric pressure assisted by short pulse voltages. The evolution of discharge current density, helium metastable (He*) density, and total electron density from the simulation demonstrates that the ignition of RF discharge could be effectively enhanced by the short pulsed discharge, and a large Peak Current in the First Period (PCFP) can be produced, which agrees well with the experimental measurements. Due to the assistance of pulsed voltage, a strong electric field could be formed near the anode with the same polarity of that near the cathode, which can reaccelerate the electrons near the anode to generate a large PCFP. Based on the simulation results, reducing the time interval and increasing the pulse rise rate are very helpful to enhance the ignition of subsequent RF discharge by strengthening the electric field near the anode. It is shown that by choosing the appropriate time interval and pulse rise rate, the pulse-modulated RF discharge assisted by the pulsed discharge can be effectively modulated and optimized for applications.
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