Modeling, Simulation and Optimization of the Mechanical Response of Micromechanical Silicon Cantilever: Application to Piezoresistive Force Sensor

Abstract

Abstract Using the fabrication techniques and materials of microelectronics as a basis, microelectromechanical systems (MEMs) make available the co-location of both mechanical and electrical components on one chip. In this work, we need to study the piezoresistive cantilevers response. This study is divided into two parts: initially we study the mechanical response. The stress repartition on the surface of the piezoresistive cantilever makes it possible to determine the ideal site of the gauges. In second part, the study of the electric response makes it possible to determine the variation of induced electric resistance within the gauges according to the deformations. The study of the mechanical parameters of the Silicon and the coefficients of piezoresistivity according to the crystallographic directions makes it possible to optimize the response of the sensor.