Abstract
An analytical model based on the slip line field theory and a finite element simulation model based on Deform 3D are set up for mechanical ruling of 79g/mm echelle grating. The theory depth of the diamond tool falling in the grating aluminum got from the analytical model can provide a reference for the simulation model, and the compared groove results of the two models are both acceptable. The dynamic grating ruling simulation and its analysis make it known that the aluminum springback on the groove surface and the bump on the groove top is the main factors of grating groove indexes deviated from theoretical values, which reveals the aluminum nature of elastic-plastic deformation regularity during grating mechanical ruling
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