Abstract
Periodic nonlinearity is the main limitation on the accuracy of the nano-displacement measurements in the heterodyne interferometers. It is mainly produced by non-ideal polarized beams of the leaser and imperfect alignment of the optical components. In this paper, we model the periodic nonlinearity resulting from non-orthogonality and ellipticity of the laser beam by using combination of neural networks such as stacked generalization method and mixture of experts. The ensemble neural networks used for nonlinearity modeling are compared with single neural networks such as multi layer percepterons and radial basis function.
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