Abstract

In this work we present a new method to describe movements of stick-slip microdrives. On the microscopic scale we model the contact between actuator and slider as a dynamic tangential contact using the method of reduction of dimensionality. On the macroscopic scale simple one- and three-dimensional equations of motion are derived. An algorithm to solve these equations will be introduced. The results of the simulation will be compared qualitatively and quantitatively to experimental investigations. Even for the simplest assumed model it proves that experimental and numerical values correlate excellently.

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