Modeling of Single and Dual Frequency Capacitive Discharge in Argon Hydrogen Mixture − Dynamic Effects and Ion Energy Distribution Functions

Abstract

Single (SF) and dual frequency capacitively coupled plasma (DF CCP) in (0–50%) H2/Ar mixtures was studied numerically with 1D hybrid (Particle‐in‐cell with Monte Carlo Collision + fluid) model. In SF (81 MHz) discharge the effect of hydrogen dilution is studied for the fixed discharge input power. Mechanisms of the plasma density decrease and variation of ions composition with H2 percentage are discussed. The effect of low‐frequency voltage on plasma density, ions composition, ions fluxes, and ions energy was studied in DF CCP (1.76–81 MHz) discharge in 5% H2/Ar gas mixture at low (20 mTorr) and high (100 mTorr) pressures.