Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma**supported by National Natural Science Foundation of China (Nos. 11275007 and 11275039), partly supported by Program for Liaoning Excellent Talents in University of China (LJQ2012098)

Abstract

We analyzed perpendicularly configured dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two radio frequency (RF) sources. Particle-in-cell/Monte Carlo (PIC/MC) simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects. Some variation and potential application of the discharging configuration is discussed briefly.