Abstract
Electrothermal microactuators have a very promising future in MEMS applications since they can generate large displacement and force with low actuating voltages and small device areas. In this paper, a temperature distribution and unload displacement model of a V-shaped electrothermal microactuator are presented. In order to prove the accuracy of the model, finite element analysis (FEA) and experimental results are provided for comparison. The results of temperature profile and unload displacement output, which are from the model calculation, FEA and experimental test, agree well with each other. It gives an indirect proof that the model is correct and FEA calculation is practicable. It can be shown that the shape of the actuator has no effect on the maximum temperature, and the unload displacement and output force depend on the beam length and inclined angle of the actuator.
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