Abstract
Ultra-precision piezoelectric inchworm motor (PIM) is widely used in the optical equipment, microelectronics semiconductor industry and precision manufacturing for motion and positioning, but the multi-physics field simulation model for estimating PIM performance and assisting motor design is rarely studied. The simulation model in this paper aimed to provide researchers with direct and convenient PIM performance evaluation to assist the motor design and development. According to the existing advanced inchworm motor products, a multi-physics field coupling model involving solid mechanics and electrostatics using the finite element method (FEM) was established. The motion gesture and performance (driving force and travel) of the PIM were analyzed, respectively. The simulation results showed that the motion gesture of the inchworm motor was well consistent with that of the actual motor product. The driving force from the simulation was close to that of the actual product, and the maximum error was 2.8%. As for the PIM travel, there was a maximum travel error of 0.6 μm between the simulation and official data. The performance parameters of the piezoelectric materials under certain specifications can be simulated by the multi-physics field coupling model. Therefore, the multi-physics field coupling simulation model is suitable for PIM performance evaluation and assisting motor development.
Highlights
A piezoelectric motor is common in ultra-precision motion, positioning, and micro-assembly with its characteristics of high resolution, instant response, and long travel [1,2,3,4]
The realization of the piezoelectric inchworm motor (PIM) motion gesture determines the feasibility of the multi-physics field simulation model of PIM
The motion gesture (d33 mode and d15 mode), driving force, and travel of the PIM were the key factors in the PIM design
Summary
A piezoelectric motor is common in ultra-precision motion, positioning, and micro-assembly with its characteristics of high resolution, instant response, and long travel [1,2,3,4]. It supports application scenarios such as the fine tuning of the mirror array of radio telescopes [5], micro adjustments in ultra-precision optical equipment [6], and gesture control of engineering robots [7]. The high-load and ultra-compact PIM has great potential in the field of demanding semiconductor lithography, because it has high requirements for reliability, position resolution, and long-term stability [8].
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