Modeling of MEMS Electrothermal Microgripper employing POD-DEIM and POD method

Abstract

Eletrothermal microgrippers are nowadays commonly used as they are small in size, low cost and easy to manufacture. Modeling of these microgrippers is challenging as most of the systems are described in partial differential equations. The microgripper is modeled through finite element method, producing a large number of ordinary differential equations, thus making model order reduction a fruitful proposition. During the design process, it has been seen that few material properties of gold and SU-8 polymer change nonlinearly with the change in generated heat making the system nonlinear. Hence, nonlinear model order reduction methods are applied here. The effectiveness of the reduction method is shown through simulation results at various levels.