Modeling of magnetically enhanced capacitively coupled plasma sources: Ar discharges

Abstract

Magnetically enhanced capacitively coupled plasma sources use transverse static magnetic fields to modify the performance of low pressure radio frequency discharges. Magnetically enhanced reactive ion etching (MERIE) sources typically use magnetic fields of tens to hundreds of Gauss parallel to the substrate to increase the plasma density at a given pressure or to lower the operating pressure. In this article results from a two-dimensional hybrid-fluid computational investigation of MERIE reactors with plasmas sustained in argon are discussed for an industrially relevant geometry. The reduction in electron cross field mobility as the magnetic field increases produces a systematic decrease in the dc bias (becoming more positive). This decrease is accompanied by a decrease in the energy and increase in angular spread of the ion flux to the substrate. Similar trends are observed when decreasing pressure for a constant magnetic field. Although for constant power the magnitudes of ion fluxes to the substrate increase with moderate magnetic fields, the fluxes decreased at larger magnetic fields. These trends are due, in part, to a reduction in the contributions of more efficient multistep ionization.