Modeling of large-scale complex re-entrant manufacturing systems by extended object-oriented Petri nets

Abstract

In this paper we propose an extended object-oriented Petri nets (EOPNs) for effective modeling of large-scale complex re-entrant manufacturing systems (ReMSs). To cope with their complexity because of the re-entrant process route and the mixed production mode, a special type of transition called a main-bus gate (MBG) is introduced, which can cause products to undergo every re-entrant manufacturing stage. A hierarchical approach is also applied to cope with the complexity. As a typical large-scale complex ReMS, the semiconductor wafer fabrication system (SWFS) is taken as an example for demonstrating the proposed EOPNs. A case study is provided to show the modelling procedures, and the resulting model validates that the EOPNs can cope well with the modelling complexity of large-scale complex ReMSs.