Abstract
Due to its noninvasive property, the interdigital capacitor (IDC) has been applied in dielectric liquid detection and characterization. In order to integrate the IDC sensor on a lab-on-chip, it is often required to minimize and optimize the sensor for sensitive and efficient performance. However, the conventional numerical simulation approach is quite time-consuming. Therefore, an efficient analytical method is proposed herein, leading to accurate capacitance and conductance expressions of an arbitrary multilayer-structured IDC. The model is validated with practical measurements of a series of coplanar waveguide (CPW) structure-based IDCs. In addition, an accurate characterization function, which relates the IDC capacitance and conductance to the complex permittivity of a material loaded on the top of the IDC sensing area, is obtained. The characterization function shows good agreement with the finite-element method (FEM) simulation results, which demonstrates the capability of the IDC sensor in dielectric spectroscopy measurements of $\mu \text{L}$ and even nL liquids.
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