Abstract
A review of the research work in the modeling of current density distribution in acid copper electrodeposition is presented. Analytical, numerical and empirical modeling works are summarized under three categories: workpiece, pattern and feature scales, according to their principle objectives. The survey reveals how deposit uniformity is jointly affected by the process and product parameters of the system. It shows also that previous researchers have been concentrating more on the modeling of the current distribution and little work has been done on the modeling and control of the variability of the actual deposit thickness, particularly at the workpiece and pattern level.
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