Abstract
In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.
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More From: IOP Conference Series: Materials Science and Engineering
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