Abstract
Modal analysis is a crucial parameter in the design process of turbomolecular pumps, as rotor resonance will seriously affect the stability and reliability of the pump. Suitable modeling is important since it will decide the quick and accurate calculation of the rotor modes. This work focuses on the modeling method and the analysis of the rotor blade modes of the turbomolecular pump. A simplified method of the blade modified model is presented, based on the basic invariance principle of the mass and the moment of inertia before and after simplification. The calculated results of the modes are compared with the original model of the rotor blade. Finally, in order to verify the accuracy of theoretical analysis, the pump is fabricated and the modal testing of the rotor blade is carried out. The results show that the first two natural frequencies of the modified rotor model are in good agreement with the experimental results. The errors of the first two natural frequencies of the rotor blade are 1.58% and 0.014%, respectively.
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