Abstract
Dimensional analysis and finite element modeling were conducted to examine conical indentation in homogeneous materials and in hard films on soft substrates. In this paper, the solid materials modeled follow the incremental theory of plasticity with a von-Mises yield surface. The validity of the Oliver–Pharr method was examined. It was found that, for hard films on soft substrates, the Oliver–Pharr method is applicable only when the indentation depth is less than 10% of the film thickness. A linear relationship between the ratio of hardness to reduced modulus and the ratio of reversible work to total work was observed for conical indentation in homogeneous materials and in hard films on soft substrates. This relationship can be used to analyze instrumented indentation experiments.
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