Modeling Carrier Mobility in Nano-MOSFETs in the Presence of Discrete Trapped Charges: Accuracy and Issues

Abstract

This paper investigates the accuracy and issues of modeling carrier mobility in the channel of a nanoscaled MOSFET in the presence of discrete charges trapped at the channel/oxide interface. By comparing drift-diffusion (DD) and Monte Carlo (MC) simulation results, a quasi-local mobility model accounting for the complex scattering profile associated with a trapped carrier at the center of the channel is firstly derived. The accuracy of this model is evaluated on a test-bed 25-nm MOS transistor at low drain bias condition and for several applied gate biases. The issues in extending this mobility model to high drain biases regime and to the case of randomly positioned trapped charges are then discussed in the second part of this paper. Our findings show that DD simulations can maintain computational efficiency and accuracy at low drain biases, when a proper mobility model is used to describe the impact of discrete trapped charges. On the other hand, more complex corrections, that go beyond the simple mobility modification, are necessary to compensate the different carrier concentrations between DD and MC approaches at high drain biases.