Abstract
ABSTRACT: This paper presents the design, modeling and analysis of ferroelectric material based MEMs with finite element method. Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity. MEMS structures can be driven by thermal, electrostatic, magnetic, optical and pneumatic drivers. Detection process is usually is made via optical and electronic signals. In this study, modal and harmonic analysis of MEMS gyroscopes composed of ferroelectric materials is realized by Finite Element Analysis, and then their results are compared. Finite element analysis of solid gyroscopes made up of PZT-5J and PZT-5H materials were modeled and simulated. Modal and harmonic analysis were performed for two different models. As a result of the analysis, model 2 of solid gyroscopes made up ​​of PZT-5H more sensitive than the angular velocities were observed.
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