Abstract
Microcoils are essential components in magnetic sensors made using Micro-electro-mechanical systems (MEMS) technology. Nonspiral microcoils have fabrication advantages over conventional spiral coils and can be effectively used in MEMS micro sensors for generation and detection of magnetic fields. In this work, an analytical model of peak flux density, sensitivity, and resolution for the nonspiral planar microcoil is reported for the first time. Self and mutual inductances of a non-spiral coil are used to calculate the flux density at the innermost turn of the coil. The model derived is compared with standard fabrication results, and it is found to be in good agreement with the experimental results.
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