Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language

Abstract

The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-A/sup TM/, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.