Abstract
A novel vertical actuator based on electrowetting on dielectric (EWOD) was designed, analyzed and simulated. Modeling results indicated that the vertical driving force of the actuator obeyed a second order polynomial of applied voltage, which was verified by Covent_ware 2006. As a result, the vertical driving force of the EWOD actuator with a 1.1nL droplet and a 1.75 μm thick polymer was about 0.5 μN under an applied voltage 100V which was comparable to that of the electrostatic actuators. Moreover, the noise from plane forces we analyzed and simulated was very low. Therefore, we made a conclusion that the EWOD actuator can be used in MEMS transducer.
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