Abstract
A nodal analysis model of a condenser microphone has been implemented in an IC design environment. The fundamental characteristics, including sensitivity, frequency response and output referred noise are obtained by co-simulation with the microphone and the readout circuit using Cadence/Spectre <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">reg</sup> simulator. The new model is capable of dealing with the multi-field coupling effects including acoustical, mechanical and electrostatic behavior. Both the numerical analysis and measured data agree with the nodal simulation results. Co-simulating the microphone and readout circuit, enables trade-off analysis between the acousto-electro-mechanical and electronic design parameters.
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