Abstract

This is the final report of a two-year, Laboratory-Directed Research and Development (LDRD) project at the Los Alamos National Laboratory (LANL). Semiconductor technology development costs and time-to-market pressures are rapidly increasing with each new technology generation. However, computer-aided integrated circuit (IC) design tools have been shown to reduce IC design time and overall costs, and the micro- and opto-electronics industries have come to believe that enlarging the modeling scope to include new materials processing simulators will have a corresponding profound impact on manufacturing. This project sought to assess the feasibility of building a suite of predictive advanced technology modeling and simulation tools for use by the semiconductor industry.

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