Abstract
The expedient way for the development of microelectromechanical systems (MEMS) based devices are based on two key steps. First, perform the simulation for the optimization of various parameters by using different simulation tools that lead to cost reduction. Second, develop the devices with accurate fabrication steps using optimized parameters. Here, authors have performed a piezoelectric analysis of an array of zinc oxide (ZnO) nanostructures that have been created on both sides of aluminum sheets. Various quantities like swerve, stress, strain, electric flux, energy distribution, and electric potential have been studied during the piezo analysis. Then actual controlled growth of ZnO nanorods (NRs) arrays was done on both sides of the etched aluminum rod at low-temperature using the chemical bath deposition (CBD) method for the development of a MEMS energy harvester. Micro creaks on the substrate acted as an alternative to the seed layer. The testing was performed by applying ambient range force on the nanostructure. It was found that the voltage range on topside was 0.59 to 0.62 mV, and the bottom side was 0.52 to 0.55 mV. These kinds of devices are useful in low power micro-devices, nanoelectromechanical systems, and smart wearable systems.
Highlights
Sensing and energy production are the hot issues of the modern era, along with price control of these technologies
Uniform, and straight arrays vibrational energy harvester with a piezoelectric effect was reported with a downshift of resonance of the zinc oxide (ZnO) nanorods on surfaces and their interfaces have a prominent role in the performance of frequencies
As the arrays of ZnO rods were on both sides of an aluminum sheet, piezo properties were defined and analyzed on only the rod-like structure
Summary
Sensing and energy production are the hot issues of the modern era, along with price control of these technologies. Uniform, and straight arrays vibrational energy harvester with a piezoelectric effect was reported with a downshift of resonance of the ZnO nanorods on surfaces and their interfaces have a prominent role in the performance of frequencies [11]. Dynamic vibrational areofimportant and can cancause be studied with to a bi-stable nanorods aligned in effects the c-axis applied stress deformation develop electromagnetic harvester [12] These piezoelectric energy harvesters can be tuned to an electric field [10]. Dependent Parameters of Nano-Harvesters force is applied on nanorods, material exhibits compression, and contrariwise the vibrations create voltage. 3 of of these parameters are involved during of synthesis or fabrication stages, and rests are involved in performance and robustness the nano-generator depend on and various.
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