Abstract
A particularly efficient piezoelectric MEMS mirror with the effective area of 10×10 mm2 for optical scanning applications has been developed using ScxAl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1-x</sub> N material as the actuator with Sc content up to x=0.43. The architecture of this novel MEMS mirror is comprised of a large-size reflective micromirror plate and four cloverleaf-shaped ScxAl <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1-x</sub> N micro-cantilever actuators. After optimization of the structural parameters, the simulated static tilting angle of Sc <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.41</sub> Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.59</sub> N MEMS mirror reaches to a peak value of ±20.5 °@120 V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DC</sub> with good linearity and two-axis operation, which is much larger than previous results. In addition, the dependence of the static tilting angle on Sc concentration has also been investigated theoretically.
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