Abstract
A control-oriented mathematical model of a continuous industrial wafer oven with inductive heating is derived. The model utilizes the specific system structure of periodically circulating baking plates. A tailored state transformation allows the formulation of a linear time-invariant discrete-time model. This model is validated based on measurements on a pilot plant. The model serves as a basis to optimize steady-state inputs and inductor positions for minimized temperature variations along the path of the baking plates.
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