Abstract

Piezoelectric actuator (PEA) is an ideal microscale and nanoscale actuator because of its ultra-precision positioning resolution. However, the inherent hysteretic nonlinearity significantly degrades the PEA’s accuracy. The measured hysteresis of PEA exhibits strong rate-dependence and saturation phenomena, increasing the difficulty in the hysteresis modeling and identification. In this paper, a modified Prandtl-Ishlinskii (PI) hysteresis model is proposed. The weights of the backlash operators are updated according to the input rates so as to account for the rate-dependence property. Subsequently, the saturation property is realized by cascading a polynomial operator with only odd powers. In order to improve the efficiency of the parameter identification, a special control input consisting of a superimposition of multiple sinusoidal signals is utilized. Because the input rate of such a control input covers a wide range, all the parameters of the hysteresis model can be identified through only one set of experimental data, and no additional curve-fitting is required. The effectiveness of the hysteresis modeling and identification methodology is verified on a PEA-driven flexure mechanism. Experimental results show that the modeling accuracy is on the same order of the noise level of the overall system.

Highlights

  • Piezoelectric actuator (PEA) has been widely utilized in ultra-precision positioning and manipulation applications due to its sub-nano motion resolution, high output force and fast response capabilities [1]

  • This paper focuses on the hysteresis modeling and identification of such systems

  • In order to improve the applicability of the hysteresis modeling and compensation method proposed in our previous work [20], this paper aims to eliminate all the manual interventions during the parameter identification process

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Summary

Introduction

Piezoelectric actuator (PEA) has been widely utilized in ultra-precision positioning and manipulation applications due to its sub-nano motion resolution, high output force and fast response capabilities [1]. The ratio between the stroke and the length of the PEA is typically on the level of 10 μm/cm; and (3) the inherent rate-dependent hysteretic and creeping nonlinearities significantly degrade the PEA’s motion accuracy. Flexure-based displacement amplification mechanisms are generally adopted to magnify the stroke of the PEA, such as the flexural lever mechanism and the flexural Scott-Russell mechanism [2,3]. For the motion control of PEAs, the hysteresis can be compensated using either the modeling-inversion based approaches [4,5,6] or the model-free feedback control [7]. The creep is the slow drift of the PEA’s output over time that can be compensated through the feedback control

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