Modeling and Fabrication of a Piezoelectric Artificial Cochlea Electrode Array With Longitudinal Coupling

Abstract

In this study, inspired from human cochlea, we propose an artificial basilar membrane structure based on an array of gold electrodes microfabricated along the opposite surfaces of a piezoelectric continuum. The proposed piezoelectric continuum features an isosceles trapezoidal geometry and is situated atop an elastomer matrix with embedded electrode grooves and a duct. At first, a detailed analytical model is presented, which formulates the continuum’s planar deflection equation, governing its elastodynamic behavior. Subsequently, in order to verify the analytical outcomes, a multiphysics finite-element analysis is performed in COMSOL®. Both analytical and numerical models demonstrate desired frequency selectivity akin to the capability of a biological basilar membrane. Subsequently, a proof-of-concept model of the proposed structure is custom-fabricated through standard photo- and soft lithography techniques using Polyvinylidene Difluoride (PVDF), gold, and Polydimethylsiloxane (PDMS) materials. Finally, the fabricated artificial basilar membrane that is intended to be used as a broad band sensor, and artificial cochlea for seamless human-robot interaction is experimentally characterized using a custom-built acoustic exciter, and its effective performance is validated within the frequency range of 3 kHz to 8 kHz.