Modeling and experiments on flexible side-electrodes electrostatic actuators: Influence of the contact interface on the available force

Abstract

This paper presents an in-depth study of electrostatic actuators based on flexible side-electrodes focusing on the available electrostatic force and the derived useful force. A design tool is proposed considering technological aspects as aspect ratio, insulating layer material and voltage level. A space discretized mechanical approach based on Euler-Bernoulli beam theory is developed to model the bending deflection of the flexible movable electrode and “zipping” contact. Analytical developments and simplifications are achieved, rapidly and efficiently implemented in a proposed algorithm. ANSYS® simulations validate the procedure for updating the contact zone through the updating of the electrostatic pressure distribution. Optimum movable electrode width and appropriate “opposable” stiffness for guiding system are discussed. A “residual air thickness” parameter is introduced to address imperfect contact between the electrodes. Experimentalcharacterization studies various prototypes with different structural parameters as thickness (50 µm and 200 µm), gaps (5 µm and 15 µm) and material for insulating layers (silicon oxide and parylene C). The metrology campaign highlights the impact of aspect ratio and oxidation/deoxidation on electrode sidewall quality and hence mechanical performance.A comparison with well-known comb-drive shows higher electrostatic force for flexible side-electrode actuators. As an example, for a 10 µm stroke, the available electrostatic force for flexible electrodes with irregular sidewalls (residual air thickness 0.6 µm) is 2.2 times greater and rises to 7.3 times greater for perfect sidewalls (no residual air).