Modeling and experiment of femtosecond laser processing of micro-holes arrays in quartz

Abstract

Quartz material irradiated by femtosecond laser has increasingly attracted widespread attention for the micro-fabrication of photonic devices. Mechanism exploration is beneficial for accelerating the digital progress of laser processing. However, the mechanism between femtosecond laser and quartz is complicated and needs further theoretical investigation. This paper established the theoretical model based on the ionization model with the Drude equation to study the space–time evolution of free electron density and its influence on the absorption coefficient, reflectivity, and ablation depth. In addition, we achieved a 10 × 10 micro-holes array with a pore size less than 10 μm, cone angle less than 2° in a 0.25 mm thick quartz on the condition of a laser pulse energy Ep = 3 μJ, scanning velocity v = 0.1 mm/s, and defocusing distance Δf = −0.3 mm via the bottom-up femtosecond laser processing. The work gives a new insight into further understanding the ablation mechanism of transparent materials etching by the femtosecond laser. It provides a practical technical scheme for preparing commercial quartz photonic devices.