Modeling and Characterization of cMUT-based Devices Applied to Galvanic Isolation

Abstract

This paper describes a new way of using cMUT technology: galvanic isolation for power electronics. These devices work like acoustic transformers, except that piezoelectricity is replaced by cMUT technology. Primary and secondary circuits are two cMUT-based transducers respectively layered on each side of a silicon substrate, through which the ultrasonic triggering signal is transmitted. A specific model based on a commercial finite element code was implemented to simulate these devices. A particular attention was paid on the modeling of the cMUT/substrate coupling which is a key feature for the intended application. First experimental results performed for model validation are presented here and discussed.