Abstract
Large complexity of microstructure in hydrogenated microcrystalline silicon and existence of at least two different sizes of crystallites is demonstrated by combined atomic force microscope topography/local current map. We correlate activation energy and prefactor of the simplest transport property – dark conductivity, measured parallel to the substrate – with the crystallinity and roughness in wide range of microcrystalline silicon samples. This allowed us to formulate a simple model of transport based on the idea that, contrary to small grains, the formation of their aggregates (large grains/columns) dramatically changes the mechanism of transport from band like to hopping.
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