Abstract
The response of the scanning acoustic microscope to scattering by a near-surface void is formulated rigorously. The transmission and reception responses of the acoustic microscope transducer-lens assembly are represented as Fourier spatial frequency spectra. Likewise, the interaction of the focused wavefield with the specimen fluid-solid interface is formulated via Fourier integrals. The scattering of the focused beam by a void positioned within the solid near the fluid-solid interface is formulated as a boundary integral equation employing the Green function for contacting fluid-solid half-spaces. The problem is evaluated numerically to demonstrate the scattering response dependence on void depth, transducer defocus, and void diameter.
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