Abstract
The subject of the article is to establish the relationships between the parameters of formation the functional surfaces of the substrates of micro-opto-electro-mechanical systems’ (MOEMS) components and their physical and technological parameters. Objectives: to increase the reliability and reproducibility of the received information, reduce the complexity of the technological process of forming, by modeling the dependences of the ratios of physical and technological parameters of forming the functional surfaces of the substrates of MOEMS components for the forming process. The methods are used: methods of experiment planning and computer processing of experimental data, mathematical models, digital computer modeling of technological processes. The following results were obtained: a mathematical model was proposed, which was used to model the influence of physical and technological parameters of the functional surfaces of the substrates of MOEMS components on their formation, with the receipt of prototypes. The results can be used in the development of technological processes of production, as substrates of functional components of MOEMS, and other functional elements for various technological purposes. A mathematical model is obtained, which allows predicting the degree of influence of physical and technological parameters of the technological process on the parameters of formation of functional surfaces of substrates of MOEMS components. Conclusions. The scientific novelty of the results is as follows: a mathematical model that has found practical implementation for computer digital modeling in the development of technological processes for the production of functional surfaces of substrates of MOEMS components is proposed, in which, unlike the existing ones, it is possible to predict the degree of influence of physical substrates of MOEMS components, which allows to plan the process of formation, increase the reproducibility of results and reduce the complexity of the technological process.
Highlights
One of the many most common types of microelectromechanical systems (MEMSs) are micro–optical electromechanical systems (MOEMSs) [1].These are microchips with functional components
The necessary parameters can be guaranteed only if the technological process of their production is strictly adhered to and the use of high–precision equipment for control and data processing [2,3,4], which can be predicted by the results of digital computer modeling
The surface roughness of the functional component is the main indicator of shaping, which is critical at each stage of manufacturing such components [6]
Summary
A mathematical model is obtained, which allows predicting the degree of influence of physical and technological parameters of the technological process on the parameters of formation of functional surfaces of substrates of MOEMS components. The scientific novelty of the results is as follows: a mathematical model that has found practical implementation for computer digital modeling in the development of technological processes for the production of functional surfaces of substrates of MOEMS components is proposed, in which, unlike the existing ones, it is possible to predict the degree of influence of physical substrates of MOEMS components, which allows to plan the process of formation, increase the reproducibility of results and reduce the complexity of the technological process
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