Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process

Abstract

Model-based control methods do not produce satisfactory control results with the batch process control of Czochralski (CZ) silicon monocrystalline with complex nonlinearity, large delay, and time-varying dynamics. Therefore, this paper proposes a data-driven model-free adaptive iterative learning control method (MFAILC) to achieve precision control of the batch process. Firstly, to improve the accuracy of the data-driven model, a novel deep learning model for crystal growth process is established by combining a stacked autoencoder (SAE) and a long short-term memory network (LSTM) to extract the working condition information and the dynamic timing features in process data. Traditional model-based control methods are limited by the difficulties in modeling and by the unmodeled dynamics. So, to overcome this problem, the heater controller and the crystal puller controller are designed, based on the iterative dynamic linearization technology, to ensure that the silicon monocrystalline batch manufacturing process always maintains precision control. Also, the discrete-time extended state observer (ESO) is introduced to compensate for the influence of disturbances, to improve the robustness of the control system. Finally, the efficacy of the proposed method is verified by applying it for the predictive modeling and batch control of thermal field temperature and crystal diameter during crystal growth.