Model for Atomic Layer Deposition of Aluminum on Inner Wall of Rectangular Pipes with Large Length Aspect Ratio

Abstract

Feasibility of aluminum thin film deposition on inner wall of rectangular pipes with length aspect ratio up to 50 by atomic layer deposition was studied, by solving kinetics equation of gas adsorption on inner wall of pipes. And the time for reactants to reach saturated adsorption in pipes was calculated. Furthermore, the process of aluminum deposition by atomic layer deposition was simulated by Kinetic Monte Carlo method, and a growth model for atomic layer deposition of aluminum on inner wall of long rectangular pipes was established.