Abstract
Development and creation of intermetallic materials and nanostructured, amorphous materials, coatings with high physicochemical properties and technologies for their production are priority strategic directions for the development of materials and technologies. A mathematical model has been developed that makes it possible to determine the stoichiometric composition of the Ti-Al-O, Ti-Al-C, Ti-Al-N coatings under given treatment conditions. On the basis of the model, a software was created that allows calculating the ionic saturation current for each of the cathodes and the flow of metal ions per unit area per unit time at an arbitrary point of the vacuum chamber. Using the software product, it is possible to determine the stoichiometric composition of the Ti-Al-O, Ti-Al-C, Ti-Al-N system coatings, depending on the technological modes of their deposition from the vacuum-arc plasma.
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