Abstract

An integrated model-based approach has been proposed for the topography characterization of surfaces in three dimensions. The approach is the integration of advantages of several techniques, such as areal autocorrelation functions in the identification of surface features and the diagnostics of model adequacy; spectral analysis in the understanding of frequency components of surfaces. The approach is based on the Wold theorem, which justifies in theory the decomposition of a stationary, surface into deterministic and stochastic components. The deterministic constituent (as a periodic lay structure for most machined surfaces) may be modelled by a Fourier series. In contrast, the stochastic constituent may be represented by a spatial model. The developed model-based system, using the technique of data compression, has been applied successfully to the investigation of 3D topography features of some machined surfaces.

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