Abstract
A model is presented, which allows to predict the (in)homogeneity of large areas covered with Laser-induced Periodic Surface Structures (LIPSS), based on the laser processing parameters (peak laser fluence and geometrical pulse-to-pulse overlap) and experimentally determined material properties. As such, the model allows to establish optimal processing conditions, given the material properties of the substrate to be processed. The model is experimentally validated over a large range of geometrical pulse-to-pulse overlap values and fluence levels on silicon using a picosecond laser source.
Highlights
Laser-induced Periodic Surface Structures (LIPSS), first found on semiconductors by Birnbaum [1] in 1965, are regular nanoscale structures, which develop on top of surfaces when processed with a laser beam in a narrow range of laser fluence levels, typically near the ablation threshold [2, 3]
When ultra-short pulsed laser sources became more readily available in the early 2000s, LIPSS with a periodicity much smaller than the laser wavelength were observed (Λ λ). These are referred to as High Spatial Frequency LIPSS (HSFL)
Dynamic experiments (OL < 1) were conducted with varying pulse overlap values ranging from OL = 0.4 to OL = 0.9 with fluence levels ranging from below, to above, the calculated peak fluence levels for processing homogeneous areas, see inequality (2.19)
Summary
Laser-induced Periodic Surface Structures (LIPSS), first found on semiconductors by Birnbaum [1] in 1965, are regular nanoscale structures, which develop on top of surfaces when processed with a laser beam in a narrow range of laser fluence levels, typically near the ablation threshold [2, 3]. Known as Low Spatial Frequency LIPSS (LSFL), are surface ripples with a distinct direction (parallel or perpendicular to the laser polarization, depending on the material), having a periodicity close to the laser wavelength, are the most studied type of LIPSS. When ultra-short pulsed laser sources became more readily available in the early 2000s, LIPSS with a periodicity much smaller than the laser wavelength were observed (Λ λ). These are referred to as High Spatial Frequency LIPSS (HSFL). -called grooves, which are bumps with a spatial periodicity bigger than the wavelength, fall under the definition of LIPSS [18]
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