Abstract
We report on the study of anchor loss in SiC microdisk resonators featuring diverse flexural vibrations in the high- and very-high-frequency (HF/VHF) bands. We observe that the quality factor (Qm,n) increases with mode index m, (number of nodal diameters), while decreases with mode index n (number of nodal circles), which can be understood by stress analysis around the anchor. Non-ideal fabrication induced pedestal offset ($\delta $) deteriorates high Qs from mode (m,0) while improves low Qs from mode (0,n) via reducing the structural symmetry. We also fabricate 3C-SiC microdisk resonators ($30\mu \text{m}$-diameter) to support our modeling. This study serves as a guideline towards high-Q flexural-mode SiC micromechanical disk resonators through mode engineering and geometric design
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