Abstract

Modal disturbance of a rod-shaped ultrasonic motor using bending vibrations can cause problems such as low motor efficiency, instability, and poor control. In this paper, a dynamic analysis model of a stator is created on the basis of the finite element method (FEM) and Hamilton principle. The modal frequency sensitivities of the stator to the structure parameters are investigated by modal analysis. Accordingly, the structure parameters of the stator are modified to separate working modes from disturbance modes. A rod-shaped ultrasonic motor stator is fabricated, and the experimental results of its amplitude frequency response characteristics show that the purpose of modal separation is achieved. The frequency separation between working modes and disturbance modes is more than 2 kHz. The validity of the method is verified.

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