Modal Characterization of MEMS Switches via Output Only and Input/Output Identification Methods

Abstract

MEMS devices typically have moving or oscillating mechanical parts, and characterization of their dynamics, including their modal parameters, is highly desirable. This paper is concerned with experimental implementation of a Stochastic Subspace Identification (SSI) algorithm as well a base excitation based identification algorithm for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). In the case of identification via the SSI, only the output response was used while the base excitation based algorithm employed the input and the output signals. The modal parameters found using MACEC matched well with those predicted by theory, and the results obtained via the two experimental identification approaches are in good agreement, thus providing confidence in using the SSI approach for experimental modal analysis of MEMS structures.