Abstract

Modal analysis of the 1 x 3 highly efficient reflective triangular grating operating in the 800 nm wavelength under normal incidence for TE polarization is presented in this Letter. The rigorous coupled wave analysis and simulated annealing algorithm are used to design this beam splitter. The reflective grating consists of a highly reflective mirror and a transmission grating on the top. The mechanism of the reflective triangular grating is clarified by the simplified modal method. Then, gratings are fabricated by direct laser writing lithography.

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