Abstract
Textured surface zinc oxide (ZnO) transparent conductive oxide (TCO) films with modulated structure have been fabricated using metal organic chemical vapor deposition (MOCVD) on superwhite glass substrates. It was found that gradient boron-doping growth for ZnO films can improve the pyramid-like grain sizes with strong light-scattering capability and optical transparences in near infrared (NIR) region resulting from decreased carrier concentration absorption. Furthermore, ZnO-TCO film with sandwich structure (boron-doped ZnO (ZnO:B)/un-doped ZnO/boron-doped ZnO (ZnO:B)) exhibited relatively higher electron mobility and higher optical transmittances as well as haze values in the wavelength range of 750–1800 nm than the conventional ZnO:B sample.
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