Abstract
六方氮化硼成核层减小MOCVD外延生长氮化铝薄膜的应力及裂纹
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https://doi.org/10.3788/gzxb20174611.1116001
Copy DOIJournal: Acta Photonica Sinica | Publication Date: Jan 1, 2017 |
六方氮化硼成核层减小MOCVD外延生长氮化铝薄膜的应力及裂纹
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