Abstract
Aerosol and liquid delivery MOCVD are techniques that were developed to overcome the problems with thermally less stable alkaline earth metal precursors in the deposition of alkaline earth doped HTS and GMR perovskites. In this paper, we will discuss the advantages and disadvantages of these techniques compared to the conventional MOCVD process. The deposition of CeO 2 films as an intermediate buffer layer for the deposition of YBa 2Cu 3O 7 on (1102) sapphire with Aerosol MOCVD will be discussed, as well as the deposition of alkaline earth doped lanthanum manganites, La 1 − x M x MnO 3 (M=Ca, Sr) on LaAlO 3, MgO and YSZ by liquid delivery MOCVD.
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